ZMI-4104C ZYGO 控制系统 DCS 位移测量模块是 ZYGO 公司（现为 AMETEK 旗下品牌）推出的一款高精度位移测量设备，专为工业自动化和精密测量应用设计。

1. 产品概述

型号：ZMI-4104C

制造商：ZYGO（AMETEK 旗下品牌）

类别：位移测量模块，适用于 DCS（分布式控制系统）

应用领域：半导体制造、光学加工、精密机械、科研实验等

2. 技术规格

测量原理：基于干涉仪技术，利用激光干涉原理实现高精度位移测量。

分辨率：亚纳米级（具体分辨率根据型号配置，如 0.15 nm、0.31 nm 等）。

测量范围：支持扩展到多达 64 个测量轴，满足复杂系统的多维度测量需求。

最大速度：±2.55 m/s（具体速度根据型号配置）。

精度：在最大速度下，精度可达 0.2 nm（σ）。

兼容性：兼容 ZYGO 的 ZMI™ 系列激光器（如 7705、7702、7714 和 7724）。

接口：支持 VME 机箱模块化安装，便于系统集成。

3. 功能特点

高精度测量：利用 ZYGO 专有的干涉仪技术，提供亚纳米级的位移分辨率，适用于精密测量场景。

多轴扩展：支持多达 64 个测量轴，满足复杂系统的多维度测量需求。

高速测量：最大测量速度可达 ±2.55 m/s，适用于高速运动物体的位移监测。

模块化设计：采用 6U VME 或 6U VME64x 板卡类型，便于集成到现有的 DCS 系统中。

循环误差补偿：具备循环误差补偿功能，可自动消除系统误差，提高测量精度。

兼容性强：兼容多种 ZYGO 激光器，方便用户根据需求选择合适的激光源。

4. 应用场景

半导体制造：用于晶圆加工、光刻机等设备的位移监测，确保加工精度。

光学加工：在光学元件的精密加工中，实时监测工件的位移和形变。

精密机械：用于高精度机床、坐标测量机（CMM）等设备的位移测量。

科研实验：在材料科学、纳米技术等领域，提供高精度的位移数据支持。

5. 优势

高精度与高速度：结合亚纳米级分辨率和高速测量能力，满足精密制造和科研的高要求。

灵活扩展：支持多轴测量，适应不同规模和复杂度的系统需求。

易于集成：模块化设计，便于与现有的 DCS 系统集成，降低系统升级成本。

可靠性高：ZYGO 作为精密测量领域的领先品牌，产品经过严格测试，确保长期稳定运行。

6. 市场反馈

行业认可：ZYGO 的 ZMI 系列位移测量模块在半导体、光学和精密制造领域享有盛誉，被多家知名企业采用。

技术领先：凭借专利的干涉仪技术和误差补偿算法，ZMI-4104C 在同类产品中具有明显的技术优势。

The ZMI-4104C ZYGO control system DCS displacement measurement module is a high-precision displacement measurement device launched by ZYGO company (now a brand under AMETEK), designed specifically for industrial automation and precision measurement applications.

1. Product Overview

model: ZMI-4104C

Manufacturer: ZYGO (a brand under AMETEK)

Category: Displacement Measurement Module, Suitable for DCS (Distributed Control System)

Application areas: semiconductor manufacturing, optical processing, precision machinery, scientific research experiments, etc

2. Technical specifications

Measurement principle: Based on interferometer technology, high-precision displacement measurement is achieved using laser interference principle.

Resolution: Sub nanometer level (specific resolution depends on model configuration, such as 0.15 nm, 0.31 nm, etc.).

Measurement range: Supports expansion to up to 64 measurement axes, meeting the multidimensional measurement needs of complex systems.

Maximum speed: ± 2.55 m/s (specific speed according to model configuration).

Accuracy: At maximum speed, the accuracy can reach 0.2 nm (σ).

Compatibility: Compatible with ZYGO's ZMI ™  Series lasers (such as 7705, 7702, 7714, and 7724).

Interface: Supports modular installation of VME chassis for easy system integration.

3. Functional features

High precision measurement: Utilizing ZYGO's proprietary interferometer technology, it provides sub nanometer displacement resolution, suitable for precision measurement scenarios.

Multi axis expansion: Supports up to 64 measurement axes to meet the multidimensional measurement needs of complex systems.

High speed measurement: The maximum measurement speed can reach ± 2.55 m/s, suitable for displacement monitoring of high-speed moving objects.

Modular design: adopting 6U VME or 6U VME64x board types, making it easy to integrate into existing DCS systems.

Cyclic error compensation: It has the function of cyclic error compensation, which can automatically eliminate system errors and improve measurement accuracy.

Strong compatibility: Compatible with multiple ZYGO lasers, making it convenient for users to choose the appropriate laser source according to their needs.

4. Application scenarios

Semiconductor manufacturing: used for displacement monitoring of equipment such as wafer processing and lithography machines to ensure processing accuracy.

Optical processing: Real time monitoring of displacement and deformation of workpieces in precision machining of optical components.

Precision machinery: used for displacement measurement of high-precision machine tools, coordinate measuring machines (CMM) and other equipment.

Research experiments: Provide high-precision displacement data support in fields such as materials science and nanotechnology.

5. Advantages

High precision and high speed: Combining sub nanometer resolution and high-speed measurement capabilities, it meets the high requirements of precision manufacturing and scientific research.

Flexible Expansion: Supports multi axis measurement and adapts to system requirements of different scales and complexities.

Easy to integrate: Modular design facilitates integration with existing DCS systems, reducing system upgrade costs.

High reliability: As a leading brand in the field of precision measurement, ZYGO's products undergo rigorous testing to ensure long-term stable operation.

6. Market feedback

Industry recognition: ZYGO's ZMI series displacement measurement module enjoys a high reputation in the fields of semiconductor, optics, and precision manufacturing, and has been adopted by many well-known enterprises.

Technological leadership: With patented interferometer technology and error compensation algorithms, ZMI-4104C has significant technological advantages among similar products.